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Ultrafast and sub-nm-precision TOF sensing, LiDARs, and 3D dynamic imaging
Over the past decade, we have developed ultralow-noise frequency combs [1] and advanced ultrasensitive electro-optic sampling-based optical-microwave timing detection techniques [2,3,4]. By taking these technologies in a new direction, we have created a novel laser ranging method that combines ultrafast measurement speed, sub-nm precision, and large non-ambiguity range (NAR) of more than several mm [5]. The need for precise yet fast surface profilometry in micro-structured devices has increased with their complexity and sophistication. Despite the development of various optical ranging techniques over the years, achieving high precision, large NAR, and fast measurement speed simultaneously has been a challenge. We have introduced a new method for fast, precise, and large-range time-of-flight (TOF) detection by using electro-optic sampling-based timing detection of optical frequency combs. Our new method enables ultrafast detection with sub-nm axial resolution over millimeters of measurable range and has been expanded to allow massively parallel TOF detection of more than 1000 optical pulses [6]. The unique combination of these capabilities facilitates fast and precise imaging of both complex structures and dynamics in three-dimensional devices and mechanical resonators. We are currently exploring the use of our technology not only for the real-time monitoring of various 3D semiconductor devices [7] in the semiconductor chip manufacturing industry but also as a new vital investigation tool for time-domain micro/nano-mechanics and quantum optomechanics.
Related Publications
[1] J. Kim and Y. Song, "Ultralow-noise mode-locked fiber lasers and frequency combs: principles, status and applications," Adv. Opt. Photon. 8, 465-540 (2016) 
[2] K. Jung and J. Kim, "Subfemtosecond synchronization of microwave oscillators with mode-locked Er-fiber lasers," Opt. Lett. 37, 2958 (2012)
[3] C. Jeon, Y. Na, B. Lee, and J. Kim, "Simple-structured, subfemtosecond-resolution optical-microwave phase detector," Opt. Lett. 43, 3997-4000 (2018)
[4] C. Ahn, Y. Na, M. Hyun, J. Bae, and J. Kim, "Synchronization of an optical frequency comb and a microwave oscillator with 53 zs/Hz1/2 resolution and 10-20-level stability," Photonics Research 10, 365-372 (2022)
[5] Y. Na, C. Jeon, C. Ahn, M. Hyun, D. Kwon, J. Shin, and J. Kim, "Ultrafast, sub-nanometre-precision and multifunctional time-of-flight detection," Nature Photon. 14, 355-360 (2020)
[6] Y. Na, H. Kwak, C. Ahn, S. Lee, W. Lee, C.-S. Kang, J. Lee, J. Suh, H. Yoo, and J. Kim, "Massively parallel electro-optic sampling of space-encoded optical pulses for ultrafast multi-dimensional imaging," Light: Science & Applications 12, 44 (2023)
[7] H. Kwak, Y. Na, C. Ahn, J. Bae, and J. Kim, "785-nm frequency comb-based time-of-flight detection for 3D surface profilometry of silicon devices," IEEE Photonics Journal 14, 3150908 (2022)
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